The reactor of the PiezoFlare 1200 is similar to its development version, the PiezoFlare 800.
The main differences are the automated wafer handling, the software and GUI.
For throughput optimization an additional option is to select a higher power excimer laser.
|16-10-2014||Professors Dave Blank and Guus Rijnders, co-founders of SolMateS, win prestigious FOM Valo...|
|01-06-2014||Prototype of new transistor for lower power consumption|
|02-04-2014||Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode|
|03-11-2013||SolMateS PZT to be used in new band-pass concept|
|03-11-2013||Arjen Janssens gives an interview in the October issue of MEMS Trends|
|27-10-2014||Piezo Mems 2014, Japan|