PiezoFlare 1200

The reactor of the PiezoFlare 1200 is similar to its development version, the PiezoFlare 800.
The main differences are the automated wafer handling, the software and GUI.

For throughput optimization an additional option is to select a higher power excimer laser.
 

News

16-10-2014 Professors Dave Blank and Guus Rijnders, co-founders of SolMateS, win prestigious FOM Valo...
01-06-2014 Prototype of new transistor for lower power consumption
02-04-2014 Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode
03-11-2013 SolMateS PZT to be used in new band-pass concept
03-11-2013 Arjen Janssens gives an interview in the October issue of MEMS Trends

Events

27-10-2014 Piezo Mems 2014, Japan