The PiezoFlare 800 is a manually operated PLD system.
This equipment can hold up to 4 different targets and can process any wafer or substrate size below a diameter of 200 mm (or 150 mm square).
The source of the Pulsed Laser process is an 80 Watt Excimer laser with a fully automated beam delivery system. The tool has been designed for ease of maintenance with a high standard of reproducibility and stability.
The reactor can process in a vacuum environment with a temperature ranging from 25 up to 800 °C with background gasses as N2, O2, or Ar and on request additional gasses are possible.
|16-10-2014||Professors Dave Blank and Guus Rijnders, co-founders of SolMateS, win prestigious FOM Valo...|
|01-06-2014||Prototype of new transistor for lower power consumption|
|02-04-2014||Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode|
|03-11-2013||SolMateS PZT to be used in new band-pass concept|
|03-11-2013||Arjen Janssens gives an interview in the October issue of MEMS Trends|