PLD R&D platform

SolMateS’ Modular PLD R&D platform (SMP-700)

The SMP-700 is the next step beyond fundamental Pulsed Laser Deposition (PLD) research. The reliable hardware is flexible for fast process optimization and allows uniform thin film deposition up to 200 mm diameter with high reproducibility. The automated software ensures easy operation and stable performance. The small footprint makes it very easy to attach it to an existing PLD beam path in the research facility. Since process recipes can be transferred directly to SolMateS’  PLD production equipment it is the ultimate valorization of thin film research. The SMP-700 is the missing link between lab and fab!

 

SMP-700 Basic features:

Substrate size:

Up to 200 mm

Substrate type:

Round, squares

Process temp.:

RT -  800 ºC

Footprint:

1400 x 1100 mm

Thickness uniformity:

WiW: < 2 % 1s

Loadlock:

Optional (SMP-800)

 

For more information please contact us.

 

 

 

 

 

 

 

 

 

 

 

 


 

News

10-11-2014 SolMateS enables full transparent OLEDs with its patented ITO on OLED deposition process
16-10-2014 Professors Dave Blank and Guus Rijnders, co-founders of SolMateS, win prestigious FOM Valo...
02-06-2014 Prototype of new transistor for lower power consumption
03-04-2014 Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode
04-11-2013 SolMateS PZT to be used in new band-pass concept

Events

11-05-2015 E-MRS Spring Meeting, France
24-05-2015 ISAF-ISIF-PFM Conference